MEMS and Nanotechnology

1. a) Explain the top down and bottom up approach of nanotechnology with suitable diagrams. [8]

b) Give the difference between metals, insulator and semiconductors with band structures. [8]

1. a) What is the effect of size and dimensions on nanostructured crystal? Explain Quantum dot, wire and Quantum well. [10]

b) Briefly explain the graphene and CNT. [6]

2. a) Briefly explain the physical vapour deposition techniques of thin films. [8]

b) Classify the different CVD techniques of thin film deposition with their process parameters and explain any one. [8]

2. a) Explain the different steps in lithographic process of pattern writing with suitable diagrams. [8]

b) Compare the x-ray and e-beam litho process. [8]

3. a) Discuss the XRD technique of characterization of thin films with D-bye Scherrer's formula. [8]

b) Compare Raman spectroscopy with NMR spectroscopy technique. [8]

3. Write the short notes on any Two: i) SEM ii) AFM iii) XPS iv) DLS [2x8=16]

4. a) What are Nano medicines? Which approach has been used for developing nano medicines? [8]

b) Explain the application of nano technology in sensing with suitable examples. [8]

4. a) Discuss the electrical, mechanical and optical properties of nano particles. [12]

b) What do you mean by nano biology? [4]

5. a) Discuss the case study of pressure sensor with packaging. [8]

b) Explain various types of MEMS packages. [8]

5. a) Explain the applications of MEMS. [8]

b) Discuss the following in brief - i) Wafer ii) Substrate and active substrate. [8]