Q4Micro and Smart System Technology
Question
2 marks
Q.4. Write down the advantages of electro-thermal actuator. [2]
Answer
Electro-thermal actuators offer the advantages of large actuation force and displacement relative to their small size, low operating voltage requirement (compared to electrostatic actuators, making them compatible with standard IC drive voltages), simple planar fabrication using standard surface-micromachining processes, and robust, reliable operation, though at the cost of relatively slow response time and higher power consumption due to the resistive (Joule) heating principle underlying their operation.