Q2Micro and Smart System Technology

A microsystem (or MEMS - Micro-Electro-Mechanical System) is a miniaturized device or system, typically with feature sizes ranging from micrometers to a few millimeters, that integrates mechanical elements, sensors, actuators, and electronics on a common silicon or other substrate using microfabrication technology derived from integrated-circuit manufacturing techniques, enabling batch-fabricated, low-cost, compact devices that combine sensing, actuation, signal processing, and control in a single miniature package.